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基于PSO优化SVM的MEMS加速度计温度补偿方法研究

刘滔 徐大诚 赵鹤鸣

现代电子技术2018,Vol.41Issue(10):58-62,66,6.
现代电子技术2018,Vol.41Issue(10):58-62,66,6.DOI:10.16652/j.issn.1004⁃373x.2018.10.015

基于PSO优化SVM的MEMS加速度计温度补偿方法研究

Research of temperature compensation method for MEMS accelerometer based on SVM optimized by PSO

刘滔 1徐大诚 1赵鹤鸣1

作者信息

  • 1. 苏州大学 微纳传感技术研究中心,江苏 苏州215000
  • 折叠

摘要

Abstract

Temperature has great influence on the performance of MEMS accelerometer. Combined with the structure and temperature characteristics of the pendulous silicon micro-accelerometer,an adaptive weight based particle swarm optimization (AW-PSO)algorithm is adopted to optimize support vector machine algorithm and create the temperature compensation model for MEMS accelerometer. STM32F405RG64 is used to realize the real-time temperature compensation system. The experimental results show that after compensation,the scale factor temperature coefficient,full-temperature zero bias range and non-linearity of the accelerometer are reduced from 264 ppm/℃,71.98 mg and 2.07% before compensation to 105 ppm/℃,10.31 mg and 0.25% respectively,which indicates that after compensation,the accelerometer performance is obviously improved,and the ef-fectiveness and feasibility of the method are demonstrated.

关键词

MEMS加速度计/扭摆式硅微加速度计/粒子群优化算法/自适应权重/支持向量机/温度补偿

Key words

MEMS accelerometer/pendulous silicon micro-accelerometer/PSO/adaptive weight/SVM/temperature com-pensation

分类

信息技术与安全科学

引用本文复制引用

刘滔,徐大诚,赵鹤鸣..基于PSO优化SVM的MEMS加速度计温度补偿方法研究[J].现代电子技术,2018,41(10):58-62,66,6.

基金项目

国家自然科学基金重点项目(61434003) (61434003)

装备预研基金项目(9140A09032015)Project Supported by Key Program of National Natural Science Foundation of China(61434003),Equipment Pre-Research Program(9140A09032015) (9140A09032015)

现代电子技术

OA北大核心CSTPCD

1004-373X

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