新型炭材料2018，Vol.33Issue(1)：88-96,9.
种晶类型对微波等离子体CVD法合成单晶体金刚石生长质量的影响
The influence of seed crystals on the quality of single-crystal diamond produced by a microwave plasma CVD method
摘要
Abstract
Natural diamonds from Liaoning and Shandong provinces,a HPHT diamond from Russia and a CVD diamond from the Element Six Company in America were selected as seed crystals for the growth of diamonds using the microwave plasma CVD method.The seeds and grown diamonds were characterized by FTIR,Raman spectroscopy,photoluminescence spectroscopy,XRD and AFM.Results indicate that the natural diamonds are type ⅠaAB with a unique orientation and great differences in internal stress and crystalline quality.The HPHT and CVD diamonds are type Ⅰb and type Ⅱa,respectively,with an angular deviation of 1-2.5 degrees and better crystal structure,and are more suitable for the CVD growth of single-crystal diamonds with little variation in internal stress and crystalline quality.The diamond layers grown on the natural ⅡaAB seed crystals from Liaoning and Shandong provinces are polycrystalline with a serious lattice mismatch and impurities of microcrystalline graphite and amorphous carbon while the diamond layers grown on the HPHT type Ⅰb seed crystal from Russia and the CVD type Ⅱa seed crystal from the Element Six Company are both of high quality.Moreover,the diamond layer grown on the CVD seed crystal has a narrower FWHM of the Raman peaks and a lower amount of non-diamond carbon impurity,indicating that it has a better crystalline quality than the diamond layer grown on the HPHT seed crystal.关键词
种晶/金刚石单晶/微波等离子体CVD/生长质量Key words
Seed crystal/Single-crystal diamond/Microwave Plasma CVD/Growth quality分类
通用工业技术引用本文复制引用
吴改,陈美华..种晶类型对微波等离子体CVD法合成单晶体金刚石生长质量的影响[J].新型炭材料,2018,33(1):88-96,9.基金项目
中国地质大学(武汉)珠宝检测技术创新中心开放基金(CIGTXM-S201410,GICTXM201504S,CIGWZ-2016017).Open Foundation Project of Center for Innovative Gem Testing Technology,China University of Geosciences (Wuhan) (CIGTXM-S201410,GICTXM201504S,CIGWZ-2016017). （武汉）
