光学精密工程2018，Vol.26Issue(3)：556-564,9.DOI:10.3788/OPE.20182603.0556
高精度弓型光纤光栅微位移传感器
High-precision bow-shaped fiber Bragg grating micro-displacement sensors
摘要
Abstract
In order to realize small deformation measurements of Numerical Control (NC) machine tool structures and micro-processing platforms,a high-precision optical fiber Bragg grating (FBG) micro-displacement-sensor based on a bow shape was designed.The grating region of the FBG was attached to the upper and lower walls of the bow.Hence,the strain value of the upper and lower walls could be measured while the bow was deformed,allowing displacement measurement and achieving temperature decoupling.Experimental results show that in the displacement range of 1 mm,the sensitivity by fitting a straight line is 2.02 pm/μm,the linearity is 2.92％,the linear correlation coefficient is 0.9983,the hysteresis error of three groups is 4.08 ％,and the repeatability error of three groups is 4.08％.A temperature compensation test is presented in addition,showing a wavelength drift of less than 1 pm with a temperature increase of 1 ℃.Furthermore,a similar half bow structure was derived and compared with the previous bow type in terms of their performance.The comparison shows that the temperature compensation of the bow type is 0.0015 pm/μm,which is smaller than that of the half bow type,while the latter has a better static calibration linearity of 0.4％.It satisfies the sensor requirements of stability,higher precision,as well as strong electromagnetic interference resistance and temperature insensitivity.关键词
光纤传感/光纤光栅/微位移传感器/高精度/温度补偿Key words
optical fiber sensing/Fiber Bragg Grating (FBG)/micro-displacement sensors/high-precision/temperature compensation分类
信息技术与安全科学引用本文复制引用
谭跃刚,陈宇佳,李瑞亚,毛健,刘芹..高精度弓型光纤光栅微位移传感器[J].光学精密工程,2018,26(3):556-564,9.基金项目
国家自然科学基金资助项目(No.51375358) （No.51375358）
