光学精密工程2018，Vol.26Issue(3)：588-596,9.DOI:10.3788/OPE.20182603.0588
用于曲面光栅刻蚀的工作台轨迹拟合及测试误差分析
Trajectory-fitting and testing error analysis of stage for curved grating etching
摘要
Abstract
To manufacture curved surface gratings with highly consistent blazing angles,the curvefitting motion of the three-dimensional (3D) stage is essential.Therefore,an investigation of the 3D stage was performed based on a control algorithm for the curved blazed grating etching system.First,a concept of the 3D stage of the curved blazed grating etching system was introduced.Subsequently,according to the actual requirement of the etching machine,the theoretical calculating method for the track of the stage was provided.Then,the arc-fitting algorithm of the stage was proposed and the curve-fitting motion of the stage was performed.Finally,the actual motion tracks of the 3D stage were measured and compared with ideal tracks.Experimental results demonstrate that the cumulative positioning error of the linear fitting motion of the stage after 15 cycles is less than 0.218 mm,and the slope angle error is less than 0.02°;the cumulative positioning error of the curve fitting motion of the stage after 40 cycles is less than 0.2 mm and the rotating angle error is in the range of-0.2°-0.1°.This method has realized the function of scanning etching and oscillating etching of the 3D stage.The stability,accuracy,and interference rejection of the stage satisfy the processing requirements.关键词
衍射光栅/曲面闪耀光栅/光栅刻蚀/三维工作台/圆弧拟合算法/轨迹误差Key words
diffraction grating/curved blazed grating/grating etching/3D stage/arc fitting algorithm/track testing error分类
数理科学引用本文复制引用
沈晨,谭鑫,朱继伟,张伟,齐向东..用于曲面光栅刻蚀的工作台轨迹拟合及测试误差分析[J].光学精密工程,2018,26(3):588-596,9.基金项目
中国科学院重大科研装备研制项目(No.YZ201005) （No.YZ201005）
国家重大科学仪器设备开发专项资金资助项目(No.2011YQ120023) （No.2011YQ120023）
