发光学报2018，Vol.39Issue(5)：692-698,7.DOI:10.3788/fgxb20183905.0692
紫外准分子激光损伤典型光学材料的特性分析
Characteristics of Typical Optical Materials Damaged by Ultraviolet Excimer Laser
摘要
Abstract
According to the theoretical model of typical optical materials damaged by ultraviolet exci-mer laser, a numerical simulation was performed to calculate temperature and thermal stress fields using finite element method. The damage effects of excimer laser on transparent optical material ( fused silica) and non transparent optical material ( K9 glass) were investigated, and the validity of the theoretical model was confirmed by the experimental results. The simulation results indicate that the laser parameters exhibit a great effect on damage effect and damage threshold. It is worth noting that the melting damage threshold is lower than the stress damage threshold when the repetition rate increases to more than 45 Hz. The thermal damage of excimer laser to the strongly adsorbed impuri-ties on the surface of fused silica is also analyzed. The theoretical analysis is in agreement with the same initial damage morphology of fused silica surface.关键词
激光损伤/紫外准分子激光/典型光学材料Key words
laser damage/ultraviolet excimer laser/typical optical material分类
信息技术与安全科学引用本文复制引用
王玺,李志明,谢运涛,聂劲松..紫外准分子激光损伤典型光学材料的特性分析[J].发光学报,2018,39(5):692-698,7.基金项目
脉冲功率激光技术国家重点实验室基金(SKL2014ZR03)资助项目 Supported by Foundation of State Key Laboratory of Pulsed Power Laser Technology(SKL2014ZR03) （SKL2014ZR03）
