金刚石与磨料磨具工程2018，Vol.38Issue(1)：16-27,12.DOI:10.13394/j.cnki.jgszz.2018.1.0003
直流电弧等离子体喷射法制备金刚石自支撑膜研究新进展
Recent progress of free-standing diamond films prepared by DC arc plasma jet method
摘要
Abstract
In this paper,the recent progress of free-standing diamond films prepared by DC (direct current) arc plasma jet is reviewed from arc characteristics,diamond crystal quality,mechanical properties,optical properties and thermal properties.The results shows that the crystalline quality and stress state of diamond films are different in various regions of arc,and that Ti transition layer can reduce the residual stress of diamond.The fracture toughness of diamond is up to 10.99 MPa·m1/2 by four-point bending method.In a certain temperature range,the change tendency of the absorption coefficient and temperature is independent of the crystalline quality and thickness of diamond films.The better optical properties of diamond films are,the higher thermal conductivity is.The thermal conductivity of nucleation surface is slightly higher than that of growth surface.When temperature is more than 500 K,the thermal conductivity of polycrystalline diamond films could approach that of single crystal.关键词
直流电弧等离子体喷射/金刚石自支撑膜/断裂韧性/吸收系数/热导率Key words
direct current arc plasma jet/free-standing diamond films/fracture toughness/absorption coefficient/thermal conductivity分类
化学化工引用本文复制引用
李成明,陈良贤,刘金龙,魏俊俊,黑立富,吕反修..直流电弧等离子体喷射法制备金刚石自支撑膜研究新进展[J].金刚石与磨料磨具工程,2018,38(1):16-27,12.基金项目
国家自然科学基金资助项目(51272024,51402013) （51272024,51402013）
