金刚石与磨料磨具工程2018，Vol.38Issue(1)：59-64,6.DOI:10.13394/j.cnki.jgszz.2018.1.0011
熔石英磨削砂轮截面轮廓分析与优化
Analysis and optimization on cross section profile of fused silica grinding wheel
摘要
Abstract
In order to improve the grinding quality of fused silica optics and reduce the depth of subsurface defect (SSD),the experiment of grinding fused silica and theoretical analysis were carried out by parallel diamond grinding wheels with straight edge and circular edge.The stress concentratio non the straight edge of wheel was the main cause of deep defects like continuous white line,whose depth was about 22 μm.To relieve the stress concentration,a combined cross section profile with circular edges was designed.The propounded dressing method was verified by wheel dressing experiment.After grinding using the latter wheel,the deep defect was constrained remarkably,and the depth of SSD was below 2.5 μm.The purpose of low defect grinding of fused silica optics was achieved.关键词
金刚石砂轮/超精密磨削/砂轮截面轮廓/熔石英元件/亚表面缺陷/加工应力Key words
diamond grinding wheel/ultra-precision grinding/cross section profile of grinding wheel/fused silica optics/sub-surface damage/manufacture defect分类
矿业与冶金引用本文复制引用
周炼,谢瑞清,陈贤华,刘民才,王健..熔石英磨削砂轮截面轮廓分析与优化[J].金刚石与磨料磨具工程,2018,38(1):59-64,6.基金项目
科学挑战计划专题资助(No.JCKY2016212A506-0504) （No.JCKY2016212A506-0504）
中国工程物理研究院质量与可靠性共性技术基础课题(No.80540). （No.80540）
