光学精密工程2018，Vol.26Issue(5)：1046-1053,8.DOI:10.3788/OPE.20182605.1046
刀口半影最小化的光刻机扫描狭缝研究
Research of scanning slit with minimal penumbra of blade''s edge in lithography
摘要
Abstract
Scanning slit is an important element for controlling exposure dose in step-and-scan lithography .Too large a penumbra of the blade''s edge in scanning slit could affect the exposure performance .Firstly ,according to the illumination principle of a step-and-scan lithography ,the calculation formula of the penumbra of the blade''s edge at the reticle plane was derived by analyzing the relationship between the intensity distribution of the reticle and the thickness and location of the blades in the scanning slit .The theoretical value of the penumbra of the coplanar and noncoplanar blade''s edges at the reticle plane was verified using the simulating light model of a 0.75 NA lithography .Secondly ,a high-accuracy scanning slit apparatus with four coplanar blades was developed,w hich not only meets the synchronization performance requirements of the step-and-scan lithography ,but also reduces the penumbra of the blade''s edges in the X and Y-direction .Finally ,the dynamic performance of the scanning blades and the actual penumbra of the blade''s edges at the reticle plane were also experimentally tested .The test results indicate that when the scanning speed reaches 470 mm/s ,the dynamic position error of the blade is within ± 30 μm and the penumbra of all edges does not exceed 0.5 mm and meets the requirements of the 90 nm step-and-scan lithography .关键词
光学光刻/步进扫描/扫描狭缝/同步/刀口半影Key words
photolithography/step-and-scan/scanning slit/synchronization/penumbra of blade''s edge分类
信息技术与安全科学引用本文复制引用
林栋梁,张方,黄惠杰..刀口半影最小化的光刻机扫描狭缝研究[J].光学精密工程,2018,26(5):1046-1053,8.基金项目
上海市科技人才计划资助项目(No.17YF1429500) （No.17YF1429500）
政府间国际科技创新合作重点专项资助项目(No.2016YFE0110600) （No.2016YFE0110600）
上海市国际科技合作基金资助项目(No.16520710500) （No.16520710500）
