光学精密工程2018，Vol.26Issue(5)：1098-1105,8.DOI:10.3788/OPE.20182605.1098
阵列微沟槽的场域离散脉冲电解加工技术
Pulse electrochemical machining of micro channel arrays in discrete fields and domains
摘要
Abstract
A method of pulse electrochemical machining in discrete fields and domains was introduced to solve the problems in microchannel arrays machining on difficult-to-cut metal surface .This method has the characteristics of processing microchannels with high surface quality and a non-penetrating structure .The machining zone of each channel was separated by the specially designed fence-like template made of nonconductive material ,and hence the electrolyte flow field and electric field are confined and improved ,because of w hich a higher process stability and good machining accuracy and consistency can be achieved .Both simulation analysis and experiments verified the effectiveness of the method .The distributions of flow field and electrical field of this method are better than those of the through-mask Electrochemical Machining(ECM)method and electrochemical pattern transfer method .Nine channels with a 538.76μm width ,25.78μm depth ,and an overcut of 19.38μm are obtained within 1min .Single-factor experiments were conducted and the results show that good process performance can be obtained with a short machining time ,low voltage amplitude ,low duty cycle ,and high pulse frequency .Thus ,the presented method of pulse EMC in discrete fields and domains is suitable for mass production of non-penetrating microstructures with the advantages of high efficiency ,high quality ,and low cost .关键词
电解加工/难加工金属/阵列微沟槽/场域离散/栅栏隔板Key words
electrochemical machining/difficult-to-cut metal/micro channel arrays/discrete fields and domains/fence-like template分类
矿业与冶金引用本文复制引用
郭钟宁,詹顺达,罗红平,刘桂贤,陈晓磊,余浩..阵列微沟槽的场域离散脉冲电解加工技术[J].光学精密工程,2018,26(5):1098-1105,8.基金项目
国家自然科学基金-广东省联合基金资助项目(No.U1601201 ) （No.U1601201 ）
国家自然科学基金-青年基金资助项目(No.51705089) （No.51705089）
国家自然科学基金-面上基金资助项目(No.51575113) （No.51575113）
