深圳大学学报（理工版）2018，Vol.35Issue(3)：257-266,10.DOI:10.3724/SP.J.1249.2018.03257
二维原子晶体半导体转移技术研究进展
Recent progress on transfer techniques of two-dimensional atomically thin semiconductor
摘要
Abstract
High efficiency and high quality transfer techniques of two-dimensional (2D) materials between different substrates are vital for fabrication of 2D heterojunctions and their flexible devices.Triggered by graphene,2D transition metal dichalcogenides (TMDs) are becoming a hot topic in 2D material research community.In the past few years,various transfer techniques mainly including wet transfer,dry transfer,thermal release tape assisted,surface energy assisted transfer,bubble transfer,and programmed vacuum stack transfer have been demonstrated.Their comparisons show that the wet transfer is the most popular one,but it relies on the polymer support and is prone to contamination of 2D materials.The dry transfer is carried out under the precise position control by a three-dimensional micromanipulator,therefore,it is suitable for building heterojunctions based on mechanical exfoliated microflake crystals.However,the efficiency is still relatively low.The thermal release tape assisted technique utilizing the strong adhesion force between the metal film and the TMDs can construct arrays directly on original substrate without transfer,however the steps are relatively complex.The surface energy assisted transfer can realize fast and automatically peel off the TMDs from the substrates according to the difference of surface energies,but it is easy to introduce folds.The bubble transfer is carried out by the bubble collapse caused by ultrasonic or electrochemical reaction,then separates the 2D material from the substrate,but the surface of the TMDs is prone to wrinkle and fracture.Recently,programmed vacuum stack shows unique advantages in assembling multi-layer heterojunction with large-scale and high-quality.This review not only provides a scientific reference for on-demand transfer method selection,but also sheds light on the development of new transfer technologies.关键词
纳米材料/二维材料/过渡金属硫化物/干法转移/湿法转移/范德瓦尔斯异质结Key words
nanomaterial/two-dimensional material/transition metal dichalcogenides/dry transfer/wet transfer/Van del Waals heterostructure分类
化学化工引用本文复制引用
李春,胡晓影,何天应,孙培华,兰长勇..二维原子晶体半导体转移技术研究进展[J].深圳大学学报（理工版）,2018,35(3):257-266,10.基金项目
National Natural Science Foundation of China (61475030,61522403,61605024)国家自然科学基金资助项目(61475030,61522403,61605024) （61475030,61522403,61605024）
