传感技术学报2018，Vol.31Issue(6)：821-825,5.DOI:10.3969/j.issn.1004-1699.2018.06.001
单硅片单面硅微机械加工的热温差式流量传感器
The Single-Wafer Single-Side Silicon Bulk-Micromachined Thermal Flow Sensor
摘要
Abstract
A novel thermal flow sensor is proposed and developed,which is fabricated only from the front side of(111)sil-icon wafer through bulk-micromachining process. COMSOL Multiphysics software is employed to optimize some sensitive parameters,which gives a promise to isolating the generating heat from the silicon wafer totally and reduces the device thermal loss at utmost. Furthermore,being benefit from the MEMS Micro-openings Inter-etch&Sealing(MIS)process,the fabricated sensor chip size is as small as 0.7 mm×0.7 mm. The testing results show that the flow sensor achieves an ultra-high normalized sensitivity of 107.88 mV/(m/s)/W with respect to heating power and gain for nitrogen gas flow. Further-more,the response time of the sensor is 1.53 ms and the accuracy is ±4%.关键词
热温差式流量传感器/热隔离/单硅片单面硅微机械加工/仿真分析Key words
thermal flow sensor/thermal isolating/single-side silicon bulk-micromaching/simulation analysis分类
信息技术与安全科学引用本文复制引用
薛丹,王家畴,李昕欣..单硅片单面硅微机械加工的热温差式流量传感器[J].传感技术学报,2018,31(6):821-825,5.基金项目
国家自然科学基金面上项目(61674160) （61674160）
