传感技术学报2018，Vol.31Issue(6)：826-829,4.DOI:10.3969/j.issn.1004-1699.2018.06.002
一种低温制备的高灵敏度MEMS电容传声器
A Low Temperature Prepared MEMS Microphone with High Sensitivity
摘要
Abstract
MEMS Microphone is the sensor converting the sound signal into the electrical signal. At present,the re-searches of MEMS Microphone mainly refer to condenser microphone,piezoelectric microphone and piezoresistive microphone. Compared with the other MEMS microphone,MEMS condenser microphone possesses prominent advan-tages of high sensitivity,high signal to noise ratio( SNR) ,flat frequency response and low temperature coefficients, which is widely applied in portable device, multimedia equipment, hearing-aid, information acquisition. A MEMS condenser microphone with high sensitivity is designed and prepared at temperature of less than 300°C which is compatible with IC processing. The method of sacrificial layer is used to develop the circular vibrating membrane which avoids stress concentration question in quadrangular membrane, which overcomes expensive dry etching. Based on polyimide material and optimized processing parameters of membrane preparation,low stress circular mem-brane is developed. The question of film adhesion in release process is avoided by designing anti-adhesive structure. According to the theoretical computation,the capacitance change of the device with the stress in vibrating membrane of 5 MPa,the radius of 2.5mm,the thickness of 1um and the electrode radius is thousandth at 1 Pa sound pressure. Compared with MEMS microphone being sold,the above capacitance change is an order of magnitude larger than that. The MEMS condenser microphone in this paper can be applied in far-field pickup that picking important sound signal from low SNR circumstance.关键词
微机电系统/电容传声器/低应力聚酰亚胺薄膜/高灵敏度/远场拾音Key words
MEMS/condenser microphone/low stress polyimide membrane/high sensitivity/far-field pickup分类
信息技术与安全科学引用本文复制引用
张忠山,汤亮..一种低温制备的高灵敏度MEMS电容传声器[J].传感技术学报,2018,31(6):826-829,4.基金项目
This work is supported by Youth Innovation Promo-tion Association CAS,the National Natural Science Foun-dation of China(Grant No. 11104313)and Sinoprobe-09-02-03. （Grant No. 11104313）
