传感技术学报2018，Vol.31Issue(6)：969-974,6.DOI:10.3969/j.issn.1004-1699.2018.06.026
改进型微悬臂梁弹性常数标定系统
Improved Calibration System of Micro-Cantilever Spring Constant
摘要
Abstract
Microcantilever is the key component of force sensor in AFM. The prerequisite for the accurate quantification of the micro-force is the traceable and accurate measurement of the normal and lateral spring constant of the microcanti-lever. Due to the limitation of microelectronics processing technology,the dimension parameters and the normal spring constant of the microcantilever cannot be accurately calibrated. Meanwhile the lateral spring constant is lack of widely ac-cepted calibration methods. The calibration system was improved based on the balance method. The combination of the ultra-precision electromagnetic balance and the optical lever structure fulfills the accurate measurement of the bending displacement and the force of the microcantilever and improves the accuracy of the normal spring constant. Microplate samples and inclined loading methods were designed to realize the indirect measurement of the lateral spring constant. Three commercial microcantilevers were calibrated respectively,and the dimension parameter method based on SEM was used as a comparison. The experimental results have good repeatability and small relative deviations. It indicates that the calibration system and method could be used as a reference for the calibration of the spring constants of microcantilevers.关键词
微悬臂梁/法向/横向/弹性常数/标定Key words
micro-cantilever/normal/lateral/spring constant/calibration分类
机械制造引用本文复制引用
耿新宇,宋云鹏,傅星,吴森..改进型微悬臂梁弹性常数标定系统[J].传感技术学报,2018,31(6):969-974,6.基金项目
国家自然科学基金项目(61204117) （61204117）
