硅酸盐通报2018，Vol.37Issue(6)：1929-1935,1950,8.
化学气相沉积六方氮化硼涂层的制备及应用
Preparation Process and Application of Hexagonal Boron Nitride Coating by Chemical Vapor Deposition
摘要
Abstract
Hexagonal boron nitride(h-BN) coating is one of the most promising functional ceramics due to its remarkable properties.In this paper, the preparation process of h-BN coating by chemical vapor deposition ( CVD ) was introduced, and the excellent performances and applications were reviewed. Moreover, the development trend of the research was prospected.Several problems in the CVD process of h-BN coating were discussed such as the defect of the boron nitride precursors, the complexity of the deposition mechanism, the poor controllability and high cost of the process.In order to realize the industrialization and application of the h-BN coating by CVD, it is recommended to have a more in-depth research in the fields of precursor, deposition mechanism, optimization and scale-up of the process.关键词
化学气相沉积/六方氮化硼/涂层/工艺/应用Key words
chemical vapor deposition/hexagonal boron nitride/coating/process/application分类
通用工业技术引用本文复制引用
高世涛,李斌,李端,张长瑞,刘荣军,王思青..化学气相沉积六方氮化硼涂层的制备及应用[J].硅酸盐通报,2018,37(6):1929-1935,1950,8.基金项目
信息系统预研项目(31512010402) （31512010402）
