Ultraviolet laser photolysis of hydrocarbons for nondiamond carbon suppression in chemical vapor deposition of diamond films
Li-Sha Fan Zahra Ahmadi Fei Wang Jeffrey Shield Bai Cui Jean-Francois Silvain Yong-Feng Lu Loic Constantin Da-wei Li Lei Liu Kamran Keramatnejad Clio Azina Xi Huang Hossein Rabiee Golgir Yao Lu
Ultraviolet laser photolysis of hydrocarbons for nondiamond carbon suppression in chemical vapor deposition of diamond films
Ultraviolet laser photolysis of hydrocarbons for nondiamond carbon suppression in chemical vapor deposition of diamond films
摘要
关键词
combustion chemical vapor deposition/diamond/photolysis/ultraviolet laserKey words
combustion chemical vapor deposition/diamond/photolysis/ultraviolet laser引用本文复制引用
Li-Sha Fan,Zahra Ahmadi,Fei Wang,Jeffrey Shield,Bai Cui,Jean-Francois Silvain,Yong-Feng Lu,Loic Constantin,Da-wei Li,Lei Liu,Kamran Keramatnejad,Clio Azina,Xi Huang,Hossein Rabiee Golgir,Yao Lu..Ultraviolet laser photolysis of hydrocarbons for nondiamond carbon suppression in chemical vapor deposition of diamond films[J].光:科学与应用(英文版),2018,7(3):35-44,10.基金项目
We gratefully appreciate the financial support from the National Science Foundation (CMMI 1265122) and the Nebraska Center for Energy Sciences Research (NCESR).In addition,we would like to express their appreciation to Dr DR Alexander in the Department of Electrical and Computer Engineering at the University of Nebraska-Lincoln for providing convenient access to the scanning electron microscope.Manufacturing and characterization analyses were performed at the NanoEngineering Research Core Facility (part of the Nebraska Nanoscale Facility),which is partially funded by the Nebraska Research Initiative.Supplementary Information accompanies the manuscript on the Light:Science & Applications website (http://www.nature.com/lsa/).Experimental procedure for diamond growth and spectroscopic diagnostics (CMMI 1265122)
OES and LIF spectra ()
rotational temperature calculation procedure ()
thermionic emission current measurement setup and thermionic current curves in situ measured during the diamond growth ()
and measurement of the lifetime of photon-induced reactive species. ()