铸造技术2018，Vol.39Issue(5)：1073-1075,3.DOI:10.16410/j.issn1000-8365.2018.05.034
磁控溅射沉积CrAlN涂层抗高温氧化性能研究
High Temperature Oxidation Resistance of CrAlN Coatings Prepared by Unbalanced Magnetron Sputtering
摘要
Abstract
The CrAlN coatings were deposited on the M2 tool steel substrates by magnetron sputtering technique. The microstructure and mechanical properties of CrAlN coatings were studied by SEM, EDS, XRD and nano-indentation. The results show that Al2O3 and Cr2O3 dense oxides form by the oxidation of CrAlN films under high temperature can effectively prevent O from further inward diffusion, the oxidation depth is only 0.2 μm after oxidation at 900 ℃ for 2 h. The mechanical properties of CrAlN film remain almost constant after oxidation at 900 ℃.关键词
磁控溅射/CrAlN涂层/高温氧化/力学性能Key words
magnetron sputtering/CrAlN coating/oxidation/mechanical properties分类
矿业与冶金引用本文复制引用
尹凌鹏,王宇星..磁控溅射沉积CrAlN涂层抗高温氧化性能研究[J].铸造技术,2018,39(5):1073-1075,3.基金项目
浙江省教育厅科研项目资助(Y201738020) （Y201738020）
