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Review:Controllable Synthesis of Two-Dimensional ( 2D) MoS2 by Chemical Vapor Deposition Process

Wei Li Yanglong Hou

哈尔滨工业大学学报（英文版）2018，Vol.25Issue(5)：1-23,23.

哈尔滨工业大学学报（英文版）2018，Vol.25Issue(5)：1-23,23.DOI:10.11916/j.issn.1005-9113.18034

Review:Controllable Synthesis of Two-Dimensional ( 2D) MoS2 by Chemical Vapor Deposition Process

Wei Li ¹Yanglong Hou²

作者信息

1. Beijing Key Laboratory for Magnetoelectric Materials and Devices (BKLMMD), Beijing 100871, China
2. Beijing Innovation Center for Engineering Science and Advanced Technology ( BIC-ESAT) , Peking University, Beijing 100871, China
折叠

摘要

关键词

CVD/MoS2/substrate/carrier gas/Mo precursor

Key words

CVD/MoS2/substrate/carrier gas/Mo precursor

分类

通用工业技术

引用本文复制引用

Wei Li,Yanglong Hou..Review:Controllable Synthesis of Two-Dimensional ( 2D) MoS2 by Chemical Vapor Deposition Process[J].哈尔滨工业大学学报（英文版）,2018,25(5):1-23,23.

基金项目

Sponsored by the National Key R &D Program of China ( Grant Nos. 2017YFA0206301 and 2016YFA0200102) and the National Natural Science Foundation of China ( Grant Nos.51631001, 51590882, 51672010 and 81421004) . （ Grant Nos. 2017YFA0206301 and 2016YFA0200102）

哈尔滨工业大学学报（英文版）

ISSN：1005-9113

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