高电压技术2018，Vol.44Issue(6)：1946-1953,8.DOI:10.13336/j.1003-6520.hve.20180529029
基于高能粒子溅射的表面深度剖析方法现状及应用
Review of Depth Profile Analysis Methods and Their Applications Based on High Energy Particle Sputtering for Material Surface
摘要
Abstract
Material surface depth profile analysis method can not only obtain the information of surface element content as the homogeneous material analysis method, but also can be used to characterize the depth distribution of elements from surface to substrate. We summarized the secondary ion mass spectrometry, Auger electron spectroscopy, X-ray photoelectron spectroscopy, glow discharge spectroscopy, and laser-induced breakdown spectroscopy from the analyses of the surface of various energetic particles. These analytical methods can be used for depth profiling and often use high energy incident particles to bombard the sample surface,and the samples are atomized or ionized layer by layer. And then the depth distribution of element is measured by the spectral, mass spectrum or electron detection device. The analytical principles, analytical characteristics, sputtering pits and typical applications in material surface analysis of these analytical methods are described in detail. Moreover, we analyzed and discussed the advantages and disadvantages of these types of depth analysis methods in the field of depth profile analysis in terms of incident particles, suitable samples, testable elements, quantitative analysis and application fields. It is pointed out that the comprehensive application of several analytical techniques can sometimes improve the applicability and accuracy of analysis using single method.关键词
高能粒子/深度剖面分析/二次离子质谱/俄歇电子能谱/X 射线光电子能谱/辉光放电光谱/激光诱导击穿光谱/等离子体Key words
high energy particle/depth profile analysis/SIMS/AES/XPS/GD-OES/LIBS/plasma引用本文复制引用
万真真,付新新,王永清,施宁..基于高能粒子溅射的表面深度剖析方法现状及应用[J].高电压技术,2018,44(6):1946-1953,8.基金项目
国家自然科学基金(61440006) （61440006）
河北省自然科学基金(B2014201008) （B2014201008）
河北大学研究生教育教学改革研究项目(Yjs2016-33) （Yjs2016-33）
河北大学实验室开放项目(sy201646). Project supported by National Natural Science Foundation of China(61440006), Nature Science Foundation of Hebei Province(B2014201008), Graduate Education Teaching Reform Research Project of Hebei University(Yjs2016-33), Hebei University Laboratory Open Project(sy201646). （sy201646）
