红外与毫米波学报2018，Vol.37Issue(5)：527-532,6.DOI:10.11972/j.issn.1001-9014.2018.05.004
p-well/DNW单光子雪崩二极管保护环的最小化设计
Minimization design of guard ring size of p-well/DNW single photon avalanche diode
摘要
Abstract
In order to further diminish the size of SPAD detector,the guard ring size of p-welL/DNW (deep nwell) SPAD was designed based on a 0.18 μm CMOS Image Sensor (CIS) technology and SPADs of varied guard ring sizes were fabricated.The measured results show that,the guard ring with its size decreased to 0.4 μm is still effective in preventing premature edge breakdown (PEB),and the guard ring size does not have a significant impact on the dark count rate (DCR) and the photon detection probability (PDP) of p-well/DNW SPADs.The SPADs achieve a low DCR and a broad spectral response,and the DCR is 638 Hz at 25℃ with a PDP peak of 16％ at 530 nm for 20 μm diameter active area structure.关键词
单光子雪崩二极管(SPAD)/保护环/边缘击穿(PEB)/暗计数率(DCR)/光子探测概率(PDP)Key words
single photon avalanche diode (SPAD)/guard ring/premature edge breakdown (PEB)/dark count rate (DCR)/photon detection probability (PDP)分类
信息技术与安全科学引用本文复制引用
杨红姣,金湘亮..p-well/DNW单光子雪崩二极管保护环的最小化设计[J].红外与毫米波学报,2018,37(5):527-532,6.基金项目
Supported by State Key Program of National Natural Science of China (61233010),National Natural Science Foundation of China (61774129,61704145) and Hunan Provincial Natural Science Fund for Distinguished Young Scholars (2015JJ1014) （61233010）
