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Progress of power field effect transistor based on ultra-wide bandgap Ga2O3 semiconductor material

Hang Dong Huiwen Xue Qiming He Yuan Qin Guangzhong Jian Shibing Long Ming Liu

半导体学报(英文版)2019,Vol.40Issue(1):18-27,10.
半导体学报(英文版)2019,Vol.40Issue(1):18-27,10.DOI:10.1088/1674-4926/40/1/011802

Progress of power field effect transistor based on ultra-wide bandgap Ga2O3 semiconductor material

Progress of power field effect transistor based on ultra-wide bandgap Ga2O3 semiconductor material

Hang Dong 1Huiwen Xue 2Qiming He 1Yuan Qin 2Guangzhong Jian 1Shibing Long 2Ming Liu1

作者信息

  • 1. Key Laboratory of Microelectronic Devices & Integration Technology, Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China
  • 2. University of Chinese Academy of Sciences, Beijing 100049, China
  • 折叠

摘要

关键词

gallium oxide (Ga2O3)/ultra-wide bandgap semiconductor/power device/field effect transistor (FET)

Key words

gallium oxide (Ga2O3)/ultra-wide bandgap semiconductor/power device/field effect transistor (FET)

引用本文复制引用

Hang Dong,Huiwen Xue,Qiming He,Yuan Qin,Guangzhong Jian,Shibing Long,Ming Liu..Progress of power field effect transistor based on ultra-wide bandgap Ga2O3 semiconductor material[J].半导体学报(英文版),2019,40(1):18-27,10.

基金项目

This work was supported by the National Natural Science Foundation of China (Nos.61521064,61522408,61574169,61334007,61474136,61574166),the Ministry of Science and Technology of China (Nos.2016YFA0201803,2016YFA0203800,2017YFB0405603),the Key Research Program of Frontier Sciences of Chinese Academy of Sciences (Nos.QYZDB-SSW-JSC048,QYZDY-SSW-JSC001),the Beijing Municipal Science and Technology Project (No.Z171100002017011),and the Opening Project of the Key Laboratory of Microelectronic Devices & Integration Technology,Institute of Microelectronics of Chinese Academy of Sciences (Nos.61521064,61522408,61574169,61334007,61474136,61574166)

半导体学报(英文版)

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