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A review of β-Ga2O3 single crystal defects, their effects on device performance and their formation mechanism

Bo Fu Zhitai Jia Wenxiang Mu Yanru Yin Jian Zhang Xutang Tao

半导体学报(英文版)2019,Vol.40Issue(1):47-57,11.
半导体学报(英文版)2019,Vol.40Issue(1):47-57,11.DOI:10.1088/1674-4926/40/1/011804

A review of β-Ga2O3 single crystal defects, their effects on device performance and their formation mechanism

A review of β-Ga2O3 single crystal defects, their effects on device performance and their formation mechanism

Bo Fu 1Zhitai Jia 1Wenxiang Mu 1Yanru Yin 1Jian Zhang 1Xutang Tao1

作者信息

  • 1. State Key Laboratory of Crystal Materials & Key Laboratory of Functional Crystal Materials and Device, Shandong University, Jinan 250100, China
  • 折叠

摘要

关键词

β-Ga2O3/crystal defects/device performance/formation mechanism

Key words

β-Ga2O3/crystal defects/device performance/formation mechanism

引用本文复制引用

Bo Fu,Zhitai Jia,Wenxiang Mu,Yanru Yin,Jian Zhang,Xutang Tao..A review of β-Ga2O3 single crystal defects, their effects on device performance and their formation mechanism[J].半导体学报(英文版),2019,40(1):47-57,11.

基金项目

We gratefully acknowledge the Financial support from the National key Research and Development Program of China (Nso.2018YFB0406502,2016YFB1102201),the National Natural Science Foundation of China (Grant No.51321091),the key Research and Development Program of Shandong Province (No.2018CXGC0410),the Young Scholars Program of Shandong University (No.2015WLJH36),and the 111 Project 2.0 (No.BP2018013). (Nso.2018YFB0406502,2016YFB1102201)

半导体学报(英文版)

OACSCDCSTPCD

1674-4926

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