人工晶体学报2019，Vol.48Issue(1)：144-148,5.
基于PolySim电子级多晶硅还原炉三维数值模拟
Three Dimensional Numerical Simulation of Electronic Grade Polysilicon Reduction Furnace Based on PolySim Software
LI You-bin 1ZHANG Sheng-tao 1HE Yin-feng 1LIANG Shi-min 1HAN Jin-dou 1FU Hao 1ZHAO Li-li1
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电子级多晶硅/化学气相沉积/数值模拟/气体循环分类
数理科学引用本文复制引用
LI You-bin,ZHANG Sheng-tao,HE Yin-feng,LIANG Shi-min,HAN Jin-dou,FU Hao,ZHAO Li-li..基于PolySim电子级多晶硅还原炉三维数值模拟[J].人工晶体学报,2019,48(1):144-148,5.
