传感技术学报2019，Vol.32Issue(1)：50-56,7.DOI:10.3969/j.issn.1004-1699.2019.01.009
双层矩形微板谐振器件中热弹性阻尼机理研究
Thermoelastic Damping in Bilayered Rectangular Microplate Resonators
摘要
Abstract
Applying the integral-transform technique, this work presented an analytical model for thermoelastic damping in the fully clamped bilayered rectangular microplates based on the framework developed by Bishop and Kinra. The present model was validated by comparison with previously reported model and the FEM model. The results demonstrate that two peak will be found when the Zener's modulus of the substrate is much greater or less than that of the film. The thicknesses of the plates have strong influence on thermoelastic damping, while the thermoelastic dissipation spectrums of the microplates are the same for a given thickness, though their shape, width and length are different.关键词
谐振器/热弹性阻尼/解析模型/双层微板/双峰Key words
resonator/thermoelastic damping/analytical model/bilayered microplate/double peaks分类
信息技术与安全科学引用本文复制引用
左万里,黄家瀚..双层矩形微板谐振器件中热弹性阻尼机理研究[J].传感技术学报,2019,32(1):50-56,7.基金项目
国家自然科学基金项目(51705261) （51705261）
