传感技术学报2019，Vol.32Issue(1)：67-70,4.DOI:10.3969/j.issn.1004-1699.2019.01.012
曲折型微机电正交磁通门传感器有限元仿真分析
Finite Element Simulation Analysis of Meandering Micro-Electro-Mechanical Orthogonal Fluxgate Sensors
摘要
Abstract
Orthogonal fluxgate sensors have a wide measurement range of magnetic field and low requirements for measurement environment. They are widely used in navigation, metal detection and exploration. The traditional orthogonal fluxgate has low sensitivity, which imposes certain limitations on the further development of its application field. A novel orthogonal fluxgate sensor with multi-turned meandering magnetic cores is presented in this paper.And the sensor is simulated by a three-dimensional electromagnetic field finite element simulation software. The simulation results show that as the number of core turns increases, the sensitivity and the linear range of the magnetic field response of the fluxgate sensor increases significantly together.关键词
微机电系统/平面曲折型磁通门传感器/有限元分析/正交磁通门传感器/弱磁检测Key words
MEMS/planar meandering fluxgate sensor/finite element simulation/orthogonal fluxgate sensor/weak magnetic field detection分类
信息技术与安全科学引用本文复制引用
闫丽丽,支绍韬,郭磊,冯竹,雷冲,周勇..曲折型微机电正交磁通门传感器有限元仿真分析[J].传感技术学报,2019,32(1):67-70,4.基金项目
中国国家自然科学基金项目(61273065) （61273065）
国家科技支撑计划项目(2012BAK08B05) （2012BAK08B05）
上海交通大学Agri-X基金项目(AgriX2015005) （AgriX2015005）
上海交通大学航天先进技术联合研究中心技术创新项目(USCAST2015-2) （USCAST2015-2）
上海交通大学分析测试中心项目 （）
上海交通大学先进电子材料与器件平台项目 （）
航天支撑技术基金项目(15GFZ-JJ02-05) （15GFZ-JJ02-05）
