光学精密工程2018，Vol.26Issue(12)：2873-2880,8.DOI:10.3788/OPE.20182612.2873
用于位相缺陷检测的反射式剪切点衍射干涉仪
Reflective shearing point diffraction interferometer for phase defect measurement
摘要
Abstract
In order to realize a large field, high resolution, and dynamic measurement of phase defects of optical components, a Reflective Shearing Point Diffraction Interferometer (RSPDI) was proposed.A lateral shear amount was introduced between the test and reference light to generate a high-density linear carrier frequency, and the information of the wavefront under the test was extracted from a single interferogram by an fast Fourier transform algorithm to determine the simultaneous measurement of the defects.The lensless imaging algorithm suppressed the diffraction effect of the defect, and the effective discrimination method of the defect type was summarized.In the experiment, an optical flat in a high-power laser system was detected by the RSPDI, and the correctness of the defect type criterion was verified.In addition, a laser-damaged optical plate was measured by the RSPDI and a VeecoNT9100 white light interferometer, with a relative error of 2.1％.The results indicate that the interferometer can be used to detect phase defects of large-aperture optical components effectively.关键词
干涉测量/瞬态测量/点衍射/位相缺陷/无镜成像Key words
interferometry/simultaneous measurement/point diffraction/phase defect/lensless imaging分类
数理科学引用本文复制引用
马云,陈磊,刘一鸣,朱文华..用于位相缺陷检测的反射式剪切点衍射干涉仪[J].光学精密工程,2018,26(12):2873-2880,8.基金项目
国家重点研发计划资助项目(No.2017YFF0107103) （No.2017YFF0107103）
