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基于后验误差拟合的角位移测量误差补偿

于海 万秋华 赵长海 卢新然 杜颖财

光学精密工程2019,Vol.27Issue(1):51-57,7.
光学精密工程2019,Vol.27Issue(1):51-57,7.DOI:10.3788/OPE.20192701.0051

基于后验误差拟合的角位移测量误差补偿

Error-compensation of angular displacement measurement based on posteriori error fitting

于海 1万秋华 1赵长海 1卢新然 1杜颖财1

作者信息

  • 1. 中国科学院 长春光学精密机械与物理研究所, 吉林 长春 130033
  • 折叠

摘要

Abstract

In the aerospace, military, and industrial fields, which have strict requirements on the volumes of devices, photoelectric encoders require not only a reduction in the size and weight of the outer diameter, but also improvements in the measurement accuracy.In this study, an error compensation method for photoelectric encoders was investigated.The error model parameters were determined based on a posteriori error-fitting method, and then depth error compensation was performed for a small photoelectric encoder.First, the main factors that affect the angle measurement error of the photoelectric encoder were analyzed, and the long-and short-period error models were established.Then, aposteriori error-fitting error compensation algorithm was proposed.Finally, a small photoelectric encoder was tested to verify the performance of the proposed error compensation algorithm.The test results demonstrate that the proposed posteriori error-fitting compensation method can significantly reduce the angle measurement error of the photoelectric encoder.We utilized an encoder toverify this method.The accuracy before compensation is 22.48″, and that after compensation is 5.82″.This approach employs a posteriori error compensation method, which can directly compensate the encoder error without considering the sizes of the error factors, and possesses the advantages of high efficiency and accurate compensation.The product precision is considerably improved when the photoelectric encoder is mass produced.

关键词

光电编码器/后验误差拟合/误差补偿/长周期误差/短周期误差

Key words

photoelectric encoder/posteriori error fitting/error-compensation/long period error/short period error

分类

信息技术与安全科学

引用本文复制引用

于海,万秋华,赵长海,卢新然,杜颖财..基于后验误差拟合的角位移测量误差补偿[J].光学精密工程,2019,27(1):51-57,7.

基金项目

吉林省科技发展计划资助项目 (No.20180520184JH) (No.20180520184JH)

国家自然科学基金资助项目 (No.51605465) (No.51605465)

光学精密工程

OA北大核心CSCDCSTPCD

1004-924X

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