光学精密工程2019，Vol.27Issue(1)：78-93,16.DOI:10.3788/OPE.20192701.0078
三维表面粗糙度测量方法综述
Review of measurement methods for areal surface roughness
摘要
Abstract
The measurement of surface roughness is a crucial tool for characterizing engineering surfaces.After more than 20 years of development, areal surface roughness has become a key factor that reflects the characteristics of engineering surfaces.This study includes summaries and comparisons of the characteristics of areal surface roughness, contact and non-contact measurement methods, and nanometer-scale surface roughness analysis methods.The applications and limitations of existing methods are also analyzed, and the direction for future development is presented.关键词
三维表面粗糙度/测量方法/接触式测量/非接触式测量/纳米表面粗糙度分析Key words
areal surface roughness/measurement methods/contact measurement/non-contact measurement/nanometer-scale surface roughness analysis分类
机械制造引用本文复制引用
何宝凤,丁思源,魏翠娥,刘柄显,石照耀..三维表面粗糙度测量方法综述[J].光学精密工程,2019,27(1):78-93,16.基金项目
国家重大科学仪器设备开发专项 (No.2013YQ590395) （No.2013YQ590395）
