红外与毫米波学报2019，Vol.38Issue(1)：3-7,5.DOI:10.11972/j.issn.1001-9014.2019.01.001
厚度与带隙可调、原子层沉积的超薄五氧化二钒纳米晶薄膜
Atomic-Layer-Deposited ultrathin films of vanadium pentoxide crystalline nanoflakes with controllable thickness and optical band-gap
摘要
Abstract
Thin films of crystalline V2O5 nanoflakes were prepared through atomic layer deposition ( ALD) process. The film thickness was verified to play a critical role in determining structural morphology, optical bandgap and Raman vibration of crystalline V2O5 thin films. Two optical bandgaps observed at about 2.8 eV and 2.4 eV result from two growth stages during ALD preparation. We expect that these results help to understand the growth control of ultrathin films and their functional devices.关键词
原子层沉积/五氧化二钒/薄膜Key words
atomic layer deposition/vanadium pentoxide/thin films分类
数理科学引用本文复制引用
张天宁,王书霞,黄田田,魏威,陈鑫,戴宁..厚度与带隙可调、原子层沉积的超薄五氧化二钒纳米晶薄膜[J].红外与毫米波学报,2019,38(1):3-7,5.基金项目
Supported by the National Key R&D Program of China(2016YFA0202200) （2016YFA0202200）
Youth Innovation Promotion Association,CAS （）
