激光技术2019，Vol.43Issue(2)：246-250,5.DOI:10.7510/jgjs.issn.1001-3806.2019.02.018
纳秒光纤激光诱导等离子体沉积铜的研究
Study on plasma deposition of copper induced by nanosecond fiber laser
摘要
Abstract
In order to achieve surface metallization on glass substrates, metallic copper was directly deposited on the surface of conventional transparent silicate glass by means of laser-induced plasma deposition technology with a T2 copper target and a cheap and easily-maintained 1064 nm wavelength infrared nanosecond fiber laser. Micro-morphology of the copper deposition layer was observed by an optical microscope and a scanning electron microscope. The results show that, in the range of laser energy density from 12.50 J/cm2 (deposition threshold) to 27.13 J/cm2 (the maximal fluence of the laser), the deposition amount of copper particles on the glass surface increases with the increase of laser fluence. Under the condition of constant laser fluence (e.g., 27.13 J/cm2) and the same horizontal and vertical spot overlaps, copper deposition process fails if the spot overlap percentage is equal to or large than 50％ bcause of the strong absorption of laser by glass. And if the overlap percentage ranges from-20％ to 50％, deposition amount of copper particles has a tendency of increase firstly and then decrease. Laser-induced plasma deposition technology is a facile process to realize surface metallization on transparent substrate material.关键词
激光技术/激光诱导等离子体沉积/纳秒光纤激光/铜沉积层/铜图案Key words
laser technique/laser-induced plasma deposition/nanosecond fiber laser/copper deposition layer/copper pattern分类
信息技术与安全科学引用本文复制引用
杨凯,秦中立,艾骏,刘建国,曾晓雁..纳秒光纤激光诱导等离子体沉积铜的研究[J].激光技术,2019,43(2):246-250,5.基金项目
国家自然科学基金面上资助项目(51775209) （51775209）
