聊城大学学报（自然科学版）2018，Vol.31Issue(4)：31-36,6.DOI:10.19728/j.issn1672-6634.2018.04.006
高效率低向上反射的氮化硅光栅耦合器
High Efficiency and Low Upward Reflection Silicon Nitride Grating Coupler
摘要
Abstract
Silicon nitride material has the advantages of low insertion loss, good thermal stability, large tolerance of fabrication and strong misalignment tolerance, and has aroused widespread concern and great interest in research.As the interface between the photonic integrated circuit and the external fiber, grating coupler has been playing an increasingly important role in many applications, because of its excellent optical coupling performance, flexible placement and easy wafer-scale test.In this paper, a perfectly vertical grating coupler based on silicon nitride material is designed using the apodized grating structure.At the wavelength of 1 550 nm, the coupling efficiency of forward transmission is 79.5％with the substrate metal mirror, and the device without metal mirror can still achieve a coupling efficiency of 57.8％.Compared with the same type of silicon grating coupler, the upward reflection loss of our device is only 0.29％, which greatly decrease the crosstalk caused by the negative second-order reflection in the optical fiber.This design provides a good reference for the actual fabrication of silicon nitride grating coupler.关键词
光互连/光子集成技术/光栅耦合器/氮化硅Key words
optical interconnection/photonic integration technology/grating coupler/silicon nitride分类
信息技术与安全科学引用本文复制引用
张赞允,朱华,李鸿强..高效率低向上反射的氮化硅光栅耦合器[J].聊城大学学报（自然科学版）,2018,31(4):31-36,6.基金项目
国家自然科学基金项目 (61504093) 资助 （61504093）
