原子与分子物理学报2019，Vol.36Issue(1)：73-81,9.DOI:10.3969/j.issn.1000-0364.2019.01.013
低压氢等离子体发光光谱
Low pressure hydrogen plasma emission spectrum
摘要
Abstract
In this work, hydrogen plasma at low pressure (1～4 kPa) was excited by 2.45 GHz microwave (100～200 W), and the emission spectrum of hydrogen plasma was detected by optical fiber spectrometer. Specific distribution of spectral lines and change of peak intensity relative to pressure and power were analyzed. Besides, the electron excitation temperature of hydrogen plasma was calculated. The experimental results showed that as the pressure increased from 1 kPa to 4 kPa, the spectra peak intensity decreased; as the power increased from 100 W to 200 W, the spectra peak intensity increased. As the pressure increased, the excited electron temperature decreased, or decreased first and then increased.关键词
低压/微波氢等离子体/发射光谱/电子激发温度Key words
Low pressure/Microwave hydrogen plasma/Emission spectrum/Electron temperature分类
数理科学引用本文复制引用
周广旭,张楚楚,徐雯峤,董开拓,朱海丰,刘鹏..低压氢等离子体发光光谱[J].原子与分子物理学报,2019,36(1):73-81,9.基金项目
中国石油大学 (华东) 大学生创新创业基金 (20171520) （华东）
