电气传动2019，Vol.49Issue(7)：94-96,3.DOI:10.19457/j.1001-2095.dqcd19533
用于纳米生产的等离子逆变电源的研制及应用
Development and Application of Plasma Inverse Power Supply for Nanometer Production
摘要
Abstract
The application of the insulated gate bipolar transistor(IGBT)inverse power supply is drawn more attention recently,especially in the production of nanometer equipment. The usage of IGBT makes products be of advantages of high frequency,small size,high efficiency and light weight. However,high-power power supply with high frequency and high voltage makes control system be complex. The structure of plasma power supply,its operating principle and model selection of key components were introduced. At the meanwhile,plasma power supply was verified through control system and temperature rise test,and satisfied result was achieved.关键词
等离子逆变电源/纳米生产用电源/高频引弧Key words
plasma inverse power supply/power supply for nanometer production/high frequency arc starter分类
信息技术与安全科学引用本文复制引用
汤海梅..用于纳米生产的等离子逆变电源的研制及应用[J].电气传动,2019,49(7):94-96,3.基金项目
2018年天津市科技计划项目(18JCTPJC53300) （18JCTPJC53300）
