噪声与振动控制2019，Vol.39Issue(4)：108-113,6.DOI:10.3969/j.issn.1006-1355.2019.04.020
压电传感器频响及抗干扰特性多物理场分析研究
Multi-physics Analysis of Frequency Response and Anti-interference Characteristics of Piezoelectric Sensors
摘要
Abstract
In order to meet the requirements of effective testing of the internal pulsating pressure field of compressors, a sensor array with wide frequency response characteristics, high sensitivity and strong anti-interference is designed and developed. Firstly, the multi-physics finite element model of the electromechanical coupling of the sensor is established. The influence of the mechanical parameters and thickness of each layer of the sensor on the piezoelectric performance is discussed one by one. Then, the frequency response characteristics of the sensor in the frequency range of 0-8×104 Hz are analyzed. Finally, the mutual interference effects between the adjacent measurement points of the sensor array are analyzed, and the variation of the piezoelectric potential of the sensor with the mechanical parameters of the material and the structural dimensions is obtained. The results show that the ideal frequency response bandwidth, sensitivity and the interference characteristics among the measurement points can be obtained by adjusting the Young's modulus and thickness of each layer of the sensor. On this basis, the piezoelectric sensor array is optimized to meet the requirements of the pulsating pressure field test.关键词
振动与波/频响特性/压电薄膜/有限元仿真/传感器/耦合场Key words
vibration and wave/ frequency response characteristics/ piezoelectric film/ finite element simulation/sensor/ coupled field分类
机械制造引用本文复制引用
周伟,荆建平..压电传感器频响及抗干扰特性多物理场分析研究[J].噪声与振动控制,2019,39(4):108-113,6.基金项目
国家自然科学基金资助项目(11672179) （11672179）
