首页|期刊导航|半导体学报(英文版)|Recent advances in lithographic fabrication of micro-/nanostructured polydimethylsiloxanes and their soft electronic applications
半导体学报(英文版)2019,Vol.40Issue(11):48-65,18.DOI:10.1088/1674-4926/40/11/111605
Recent advances in lithographic fabrication of micro-/nanostructured polydimethylsiloxanes and their soft electronic applications
Recent advances in lithographic fabrication of micro-/nanostructured polydimethylsiloxanes and their soft electronic applications
摘要
关键词
lithographic technique/microstructure/nanostructure/polydimethylsiloxane/soft electronicsKey words
lithographic technique/microstructure/nanostructure/polydimethylsiloxane/soft electronics引用本文复制引用
Donghwi Cho,Junyong Park,Taehoon Kim,Seokwoo Jeon..Recent advances in lithographic fabrication of micro-/nanostructured polydimethylsiloxanes and their soft electronic applications[J].半导体学报(英文版),2019,40(11):48-65,18.基金项目
This research was supported by the National Research Foundation (NRF) of Korea funded by the Ministry of Science and ICT and Future Planning (MSIP) (2016R1E1A1A01943131). (NRF)