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A review on polishing technology of large area free-standing CVD diamond films

ZHANG Pingwei TONG Tingting LI Yifeng

金刚石与磨料磨具工程2019，Vol.39Issue(6)：53-61,9.

金刚石与磨料磨具工程2019，Vol.39Issue(6)：53-61,9.DOI:10.13394/j.cnki.jgszz.2019.6.0010

A review on polishing technology of large area free-standing CVD diamond films

ZHANG Pingwei ¹TONG Tingting ²LI Yifeng¹

作者信息

1. Hebei Plasma Diamond Technology Co.,Ltd.,Shijiazhuang 050000 ,China
2. Hebei Institute of Laser,Shijiazhuang 050000 ,China
折叠

摘要

关键词

large area free-standing CVD diamond films/mechanical polishing/chemical mechanical polishing/tribochemical polishing technology

Key words

large area free-standing CVD diamond films/mechanical polishing/chemical mechanical polishing/tribochemical polishing technology

分类

矿业与冶金

引用本文复制引用

ZHANG Pingwei,TONG Tingting,LI Yifeng..A review on polishing technology of large area free-standing CVD diamond films[J].金刚石与磨料磨具工程,2019,39(6):53-61,9.

基金项目

Science and technology plan project of Hebei Academy of Sciences (No.191408) （No.191408）

Natural Science Foundation of Hebei Province(E2019302005). （E2019302005）

金刚石与磨料磨具工程

OA北大核心CSTPCD

ISSN：1006-852X

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