人工晶体学报2020，Vol.49Issue(2)：195-204,10.
镁/钛离子注入对蓝宝石微结构和机械性能的影响
Effect of Magnesium/Titanium Ions Implantation on the Microstructure and Mechanical Properties of Sapphire
摘要
Abstract
Ions implantation has proven to be a reliable way for sapphire to create new optical and mechanical surface proper-ties. In this paper, the magnesium/titanium ions were chosen to implant in the surface modification of sapphire with different ions energy and fluence. The projected range and straggling of ions were calculated by simulation program of the Transport of Ion Matter code. Information about the damage depth distribution and the occurrence of microstructural modifications were ana-lyzed by Raman spectroscopy and glancing incidence X-ray diffraction. According to the test results, the nanohardness, nano-scratch and infrared properties of sapphire show a tunable property with the ion implantation.关键词
离子注入/蓝宝石/表面改性Key words
ions implantation/sapphire/surface modification分类
数理科学引用本文复制引用
张海亮,张明福,韩杰才,侯永昭,杨雯..镁/钛离子注入对蓝宝石微结构和机械性能的影响[J].人工晶体学报,2020,49(2):195-204,10.基金项目
National Natural Science Foundation of China ( 11002043 ) （ 11002043 ）
Fundamental Research Funds for the Central Universities ( HIT. KLOF. 2010028) （ HIT. KLOF. 2010028）
