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首页|期刊导航|红外与毫米波学报|1.55μm AlGaInAs/InP小发散角量子阱激光器的仿真和制备

1.55μm AlGaInAs/InP小发散角量子阱激光器的仿真和制备

熊迪 郭文涛 郭小峰 刘海峰 廖文渊 刘维华 张杨杰 曹营春 谭满清

红外与毫米波学报2019,Vol.38Issue(4):412-418,7.
红外与毫米波学报2019,Vol.38Issue(4):412-418,7.DOI:10.11972/j.issn.1001-9014.2019.04.004

1.55μm AlGaInAs/InP小发散角量子阱激光器的仿真和制备

Simulation and fabrication of 1.55 μm AlGaInAs/InP quantum well lasers with low beam divergence

熊迪 1郭文涛 2郭小峰 1刘海峰 1廖文渊 1刘维华 2张杨杰 1曹营春 2谭满清1

作者信息

  • 1. 中国科学院半导体研究所集成光电子国家重点实验室,北京100083
  • 2. 中国科学院大学材料科学与光电工程中心,北京100083
  • 折叠

摘要

Abstract

1.55 μm A1GaInAs/InP quantum well lasers with low beam divergence have been theoretically designed and experimentally fabricated.An asymmetrical mode expand layer (MEL) was inserted in lower cladding to expand near field intensity distribution and decrease internal loss.Simulation results showed that the use of MEL didn't influence the laser performance negatively but dramatically decreased the vertical beam divergence at the cost of slightly increase of threshold current.And the experiment results showed high agreement to it.With a 4 μmwide and 1000 μm-long ridge waveguide laser with MEL,the threshold current and output power of single facet without coating is 56 mA and 17.38 mw@120 mA,and the slope efficiency is 0.272 W/A.The vertical beam divergence is 29.6° and decreases about 35.3% compared to that of typical lasers.

关键词

铟磷基激光器/发散角/光场分布

Key words

InP-based lasers/beam divergence/intensity distribution

分类

数理科学

引用本文复制引用

熊迪,郭文涛,郭小峰,刘海峰,廖文渊,刘维华,张杨杰,曹营春,谭满清..1.55μm AlGaInAs/InP小发散角量子阱激光器的仿真和制备[J].红外与毫米波学报,2019,38(4):412-418,7.

基金项目

Supported by the Joint Science Foundation of Chinese Academy of Science. ()

红外与毫米波学报

OA北大核心CSCDCSTPCDSCI

1001-9014

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