材料科学与工程学报2020，Vol.38Issue(3)：355-362,381,9.DOI:10.14136/j.cnki.issn1673-2812.2020.03.002
刀具磨损对于单点金刚石切削单晶硅的影响
Influence of Tool Wear on Cutting Mechanism of Single Point Diamond Turning of Silicon
摘要
Abstract
Single point diamond turning (SPDT)is the most commonly used method of processing monocrystalline silicon.Tool wear is an important factor affecting the machined surface or subsurface quality of workpiece while the wear mechanism is unclear.Molecular dynamics (MD) simulation model for SPDT of silicon was established to study the effect of tool wear on the cutting mechanism.Simulation results revealed that the cutting force,the surface damage layer thickness,the dislocation distribution area,the degree of shear deformation and phase change increase with the increase of tool wear.The squeeze effect plays a leading role when using a worn tool to machine single crystal silicon,while it is shearing deformation with unworn tool.Damaged layer on the machine surface is mainly comprised of amorphous phase of silicon.Thrust force Ft with a worn tool is about four times higher than that with an unworn tool.Simulation results suggested that plastic deformation takes place when using new diamond tool,while it will be accompanied by brittle fracture with a worn tool.关键词
单晶硅/切削/刀具磨损/分子动力学模拟Key words
Single crystal silicon/Cutting/Tool wear/MD simulation分类
化学化工引用本文复制引用
郭晓光,王晓丽,康仁科,金洙吉,罗熙淳..刀具磨损对于单点金刚石切削单晶硅的影响[J].材料科学与工程学报,2020,38(3):355-362,381,9.基金项目
The National Natural Science of China (General Program)(51575083),Major Research Projects of the National Natural Science Foundation of China (91323302),Science Fund for Creative Research Groups (51621064),the EPSRC (EP/K018345/1)and Royal Society-NSFC International Exchange Programme (IE141422) （General Program）
