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Controlled Movements in Superlubric MEMS

Cangyu Qu Xiaojian Xiang Ming Ma Quanshui Zheng

哈尔滨工业大学学报（英文版）2020，Vol.27Issue(3)：45-57,13.

哈尔滨工业大学学报（英文版）2020，Vol.27Issue(3)：45-57,13.DOI:10.11916/j.issn.1005-9113.20037

Controlled Movements in Superlubric MEMS

Cangyu Qu ¹Xiaojian Xiang ¹Ming Ma ²Quanshui Zheng³

作者信息

1. Institute of Superlubricity Technology, Research Institute of Tsinghua University in Shenzhen, Shenzhen 518057, Guangdong,China
2. Center for Nano and Micro Mechanics, Tsinghua University, Beijing 100084, China
3. State Key Laboratory of Tribology &Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China
折叠

摘要

关键词

structural superlubricity/MEMS/resonator/controlled movement

Key words

structural superlubricity/MEMS/resonator/controlled movement

分类

机械制造

引用本文复制引用

Cangyu Qu,Xiaojian Xiang,Ming Ma,Quanshui Zheng..Controlled Movements in Superlubric MEMS[J].哈尔滨工业大学学报（英文版）,2020,27(3):45-57,13.

基金项目

Sponsored by the the National Natural Science Foundation of China (Grant Nos. 11572173, 11890671, 51961145304 and 11921002), the National Key Basic Research Program of China ( Grant No. 2013CB934200) , the Cyrus Tang Foundation ( Grant No. 202003) , the Beijing Municipal Science&Technology Commission (Grant No. Z151100003315008), the Tsinghua University Initiative Scientific Research (Grant Nos. 2014Z01007 and 2012Z01015) , and the State Key Laboratory of Tribology Tsinghua University Initiative Scientific Research ( Grant No. SKLT2019D02) . （Grant Nos. 11572173, 11890671, 51961145304 and 11921002）

哈尔滨工业大学学报（英文版）

ISSN：1005-9113

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