红外与毫米波学报2020，Vol.39Issue(3)：273-278,6.DOI:10.11972/j.issn.1001-9014.2020.03.001
一种基于光学集成芯片的紧凑型结构光产生系统
Compact on-chip structured illumination system based on integrated optics
摘要
Abstract
Structured illumination has been used for several decades in the field of three-dimensional(3D)shapemeasurement and machine vision. However,the bulky structured illumination generation system limits its poten-tial in practical applications. In this paper,a compact design method based on the silicon-on-insulator(SOI)opto-electronic integrated chip is proposed. Compared with the traditional structured light generation methods,the chip-based illumination method is simple,stable and flexible. The beam modulation and interference are achieved by on-chip devices,which efficiently avoids external disturbance and increases the portability of system. This is the first time using only on-chip devices to control the infrared beam and generate structured light pattern. The chip can provide an illumination area of about 200*200μm2 with the chip size of 0. 5*0. 5 mm. The illumination area and structural period are related to the design of grating couplers and the wavelength of light. Moreover,dif-ferent illumination patterns can be achieved by appropriately designing the optical devices on the chip.关键词
集成光学/结构光/片上/光栅Key words
integrated optics/structured illumination/on-chip/gratings分类
信息技术与安全科学引用本文复制引用
王辰,俞育德,李芳,李智勇..一种基于光学集成芯片的紧凑型结构光产生系统[J].红外与毫米波学报,2020,39(3):273-278,6.基金项目
Supported by the National Key Research and Development Plan of China(2016YFB0402502)and the National Natural Science Founda-tion of China(61804148). （2016YFB0402502）
