红外与毫米波学报2020，Vol.39Issue(3)：279-283,5.DOI:10.11972/j.issn.1001-9014.2020.03.002
CMOS兼容的中红外多通道光子晶体传感器
CMOS compatible multichannel mid-infrared photonic crystal sensor
摘要
Abstract
We propose a multichannel two-dimensional optical chemical sensor in a photonic crystal(PhC)slab.The device is composed of four cavities with a center wavelength at 3. 3μm,and the channels are spaced by 10nm. The sensor is designed on an 800-nm-thick silicon-on-insulator platform for standard CMOS technology. The optical characteristics of the nanocavity structure are simulated by 3-D finite difference time-domain(FDTD) method. The transmittance of each channel is about 39％,with non-uniformity of transmittance across channels less than 0. 25dB. The capability of the sensor is demonstrated by detecting carbon tetrachloride and benzene solu-tions,and shows a sensitivity of 209. 2nm/RIU.关键词
光子晶体/传感器/多通道/中红外Key words
photonic crystal/sensor/multichannel/mid-infrared分类
数理科学引用本文复制引用
周易,王磊,李军,杨雪雷,甘峰源,赵瑛璇,仇超,李伟..CMOS兼容的中红外多通道光子晶体传感器[J].红外与毫米波学报,2020,39(3):279-283,5.基金项目
Supported by the Shanghai Sailing Program(18YF1428200,18YF1428100) （18YF1428200,18YF1428100）
