纳微快报（英文）2021，Vol.13Issue(2)：363-376,14.
High Yield Transfer of Clean Large-Area Epitaxial Oxide Thin Films
High Yield Transfer of Clean Large?Area Epitaxial Oxide Thin Films
摘要
Abstract
In this work, we have developed a new method for manipulating and transferring up to 5 mm × 10 mm epitax-ial oxide thin films. The method involves fixing a PET frame onto a PMMA attachment film, enabling transfer of epitaxial films lifted-off by wet chemical etching of a Sr3Al2O6 sacri-ficial layer. The crystallinity, surface morphology, continuity, and purity of the films are all preserved in the transfer process. We demonstrate the applicability of our method for three dif-ferent film compositions and structures of thickness ～ 100 nm. Furthermore, we show that by using epitaxial nanocomposite films, lift-off yield is improved by ～ 50％ compared to plain epitaxial films and we ascribe this effect to the higher frac-ture toughness of the composites. This work shows important steps towards large-scale perovskite thin-film-based electronic device applications.关键词
Free-standing oxide thin films/High yield transfer/Wet etching/Crack preventionKey words
Free-standing oxide thin films/High yield transfer/Wet etching/Crack prevention引用本文复制引用
Bowen Zhang,Chao Yun,Judith L.Mac,Manus-Driscoll..High Yield Transfer of Clean Large-Area Epitaxial Oxide Thin Films[J].纳微快报（英文）,2021,13(2):363-376,14.基金项目
BZ would like to thank Cambridge Trust and China Scholarship Council for their funding. JLM-D would like to thank the support from the UK Royal Academy of Engineering, grant CiET1819_24, EPSRC grants EP/L011700/1, EP/N004272/1, EP/P007767/1 (CAM-IES), and EP/T012218/1. （CAM-IES）
