半导体学报（英文版）2021，Vol.42Issue(2)：4-7,4.DOI:10.1088/1674-4926/42/2/020301
Design technology co-optimization towards sub-3 nm technology nodes
Design technology co-optimization towards sub-3 nm technology nodes
Genquan Han 1Yue Hao1
作者信息
- 1. School of Microelectronics,Xidian University,Xi'an 710071,China
- 折叠
引用本文复制引用
Genquan Han,Yue Hao..Design technology co-optimization towards sub-3 nm technology nodes[J].半导体学报（英文版）,2021,42(2):4-7,4.
