半导体学报(英文版)2021,Vol.42Issue(2):40-51,12.DOI:10.1088/1674-4926/42/2/023103
Photoic crystal nanobeam cavity devices for on-chip integrated silicon photonics
Photoic crystal nanobeam cavity devices for on-chip integrated silicon photonics
摘要
关键词
PCNC/integrated silicon photonics/More-than-Moore/lab-on-a-chip/hybrid devicesKey words
PCNC/integrated silicon photonics/More-than-Moore/lab-on-a-chip/hybrid devices引用本文复制引用
Daquan Yang,Xiao Liu,Xiaogang Li,Bing Duan,Aiqiang Wang,Yunfeng Xiao..Photoic crystal nanobeam cavity devices for on-chip integrated silicon photonics[J].半导体学报(英文版),2021,42(2):40-51,12.基金项目
This work was supported by the National Key R&D Pro-gram of China(Grant No.2016YFA0301302 and No.2018YFB 2200401),the National Natural Science Foundation of China(Grant Nos.11974058,11825402,11654003,61435001),Bei-jing Academy of Quantum Information Sciences(Grant No.Y18G20),Key R&D Program of Guangdong Province(Grant No.2018B030329001),Beijing Nova Program(Grant No.Z201100006820125)from Beijing Municipal Science and Tech-nology Commission,Fundamental Research Funds for the Central Universities(Grant No.2018XKJC05)and the High Per-formance Computing Platform of Peking University. (Grant No.2016YFA0301302 and No.2018YFB 2200401)