纳微快报（英文）2021，Vol.13Issue(4)：221-233,13.
Epitaxial Lift-Off of Flexible GaN-Based HEMT Arrays with Performances Optimization by the Piezotronic Effect
Epitaxial Lift?Off of Flexible GaN?Based HEMT Arrays with Performances Optimization by the Piezotronic Effect
摘要
Abstract
High-electron-mobility transistors (HEMTs) are a prom-ising device in the field of radio frequency and wireless communica-tion. However, to unlock the full potential of HEMTs, the fabrication of large-size flexible HEMTs is required. Herein, a large-sized (> 2 cm2) of AlGaN/AlN/GaN heterostructure-based HEMTs were successfully stripped from sapphire substrate to a flexible polyethylene terephtha-late substrate by an electrochemical lift-off technique. The piezotronic effect was then induced to optimize the electron transport performance by modulating/tuning the physical properties of two-dimensional elec-tron gas (2DEG) and phonons. The saturation current of the flexible HEMT is enhanced by 3.15％ under the 0.547％ tensile condition, and the thermal degradation of the HEMT was also obviously suppressed under compressive straining. The corresponding electrical performance changes and energy diagrams systematically illustrate the intrinsicmechanism. This work not only provides in-depth understanding of the piezotronic effect in tuning 2DEG and phonon properties in GaN HEMTs, but also demonstrates a low-cost method to optimize its electronic and thermal properties.关键词
AlGaN/AlN/GaN heterojunction/Epitaxial lift-off/Flexible membrane/Two-dimensional electron gas/Piezotronic effectKey words
AlGaN/AlN/GaN heterojunction/Epitaxial lift-off/Flexible membrane/Two-dimensional electron gas/Piezotronic effect引用本文复制引用
Xin Chen,Jianqi Dong,Chenguang He,Longfei He,Zhitao Chen,Shuti Li,Kang Zhang,Xingfu Wang,Zhong Lin Wang..Epitaxial Lift-Off of Flexible GaN-Based HEMT Arrays with Performances Optimization by the Piezotronic Effect[J].纳微快报（英文）,2021,13(4):221-233,13.基金项目
This research was supported by Key-Area Research and Development Program of Guangdong Province (Nos. 2020B010172001, 2020B010174004), GDAS' Project of Science and Technology Development(No. 2018GDASCX-0112), Sci-ence and Technology Program of Guangzhou (No. 2019050001), National Key Research and Development Program of China (No. 2017YFB0404100), National Natural Science Foundation of China (Grant No. 11804103) and Guangdong Natural Sci-ence Foundation for Distinguished Young Scholars (Grant No. 2018B030306048). （Nos. 2020B010172001, 2020B010174004）
