中国光学2021，Vol.14Issue(1)：213-225,13.DOI:10.37188/CO.2020-0101
超快贝塞尔光束在硫化锌晶体表面制备纳米孔
Writing nanopores on a ZnS crystal with ultrafast Bessel beams
摘要
Abstract
Zinc sulfide(ZnS)crystal is one of the important materials used to make the wide-spectrum in-frared window.The ultrafast laser technology for manufacturing the nanopores with high aspect ratio provides an important approach to fabricate the photonic devices such as mid-infrared waveguide Fourier transform spectrometer etc.In this paper,a 40-times-demagnification ultrafast laser direct-writing system was built with a 4f system and a Gaussian-Bessel beam generated by a quartz axicon and a Yb:KGW laser source that operated at a wavelength of 1030 nm,a repetition rate of 100 kHz and a pulse width tunable from 223 fs to 20 ps.When the pulse energy was changed from 36 pJ to 63 pJ and the pulse duration was changed from 12.5 ps to 20 ps,the nanopore structure with a diameter of 80～320 nm was successfully written on the ZnS crystal.The surface morphology,diameter and depth of the nanopores were determined by FIB(Focused Ion Beams)ablation and SEM(Scanning Electron Microscopy)imaging.The influence of laser pulse energy and pulse width on the nanopores was studied.The results show that when the pulse width is 20 ps and the pulse energy is 48 pJ,the depth of a nanopore is about 270 pm.关键词
硫化锌晶体/高深径比纳米孔/光子器件/高斯-贝塞尔光束Key words
ZnS crystal/high aspect ratio nanopores/photonic devices/Gaussian-Bessel beam分类
信息技术与安全科学引用本文复制引用
常改艳,王玉恒,程光华..超快贝塞尔光束在硫化锌晶体表面制备纳米孔[J].中国光学,2021,14(1):213-225,13.基金项目
国家重点研发计划(No.2018YFB1107401) （No.2018YFB1107401）
国家自然科学基金(No.61775236)资助项目 （No.61775236）
