半导体学报（英文版）2021，Vol.42Issue(4)：33-42,10.DOI:10.1088/1674-4926/42/4/041303
Hybrid material integration in silicon photonic integrated circuits
Hybrid material integration in silicon photonic integrated circuits
Swapnajit Chakravarty 1Min Teng 1Reza Safian 1Leimeng Zhuang1
作者信息
- 1. IMEC USA,194 Neocity Way,Kissimmee,FL 34744,USA
- 折叠
摘要
关键词
CMOS technology/photonic integrated circuits/hybrid integration/ferroelectric modulatorKey words
CMOS technology/photonic integrated circuits/hybrid integration/ferroelectric modulator引用本文复制引用
Swapnajit Chakravarty,Min Teng,Reza Safian,Leimeng Zhuang..Hybrid material integration in silicon photonic integrated circuits[J].半导体学报（英文版）,2021,42(4):33-42,10.
