半导体学报(英文版)2021,Vol.42Issue(4):43-52,10.DOI:10.1088/1674-4926/42/4/041304
Photonic devices based on thin-film lithium niobate on insulator
Photonic devices based on thin-film lithium niobate on insulator
摘要
关键词
thin-film lithium niobate/modulator/PPLN/edge couplerKey words
thin-film lithium niobate/modulator/PPLN/edge coupler引用本文复制引用
Shuai Yuan,Jinsong Xia,Changran Hu,An Pan,Yuedi Ding,Xuanhao Wang,Zhicheng Qu,Junjie Wei,Yuheng Liu,Cheng Zeng..Photonic devices based on thin-film lithium niobate on insulator[J].半导体学报(英文版),2021,42(4):43-52,10.基金项目
This work is supported by the National Key Research and Development Program of China(2019YFB2203800)and the National Natural Science Foundation of China under Grant No.61835008,61905079,and 61905084.We thank the Center of Micro-Fabrication and Characterization(CMFC)of WNLO and the Center for Nanoscale Characterization&Devices(CNCD),WNLO of HUST for the facility support. (2019YFB2203800)