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Theoretical Analysis of Solidly Mounted Film Bulk Acoustic Resonator with Nanocrystalline Diamond as High Impedance Material of Bragg Reflector

Yujia E Sen Zhang Bing Dai Jiaqi Zhu Jiecai Han

哈尔滨工业大学学报（英文版）2021，Vol.28Issue(2)：1-7,7.

哈尔滨工业大学学报（英文版）2021，Vol.28Issue(2)：1-7,7.DOI:10.11916/j.issn.1005-9113.19051

Theoretical Analysis of Solidly Mounted Film Bulk Acoustic Resonator with Nanocrystalline Diamond as High Impedance Material of Bragg Reflector

Yujia E ¹Sen Zhang ¹Bing Dai ¹Jiaqi Zhu ¹Jiecai Han¹

作者信息

1. Center for Composite Materials and Structures, Harbin Institute of Technology, Harbin 150080, China
折叠

摘要

关键词

solidly mounted resonator ( SMR)/nanocrystalline diamond ( NCD)/Bragg reflector/quality factor ( Q )/parasitic effect

Key words

solidly mounted resonator ( SMR)/nanocrystalline diamond ( NCD)/Bragg reflector/quality factor ( Q )/parasitic effect

分类

数理科学

引用本文复制引用

Yujia E,Sen Zhang,Bing Dai,Jiaqi Zhu,Jiecai Han..Theoretical Analysis of Solidly Mounted Film Bulk Acoustic Resonator with Nanocrystalline Diamond as High Impedance Material of Bragg Reflector[J].哈尔滨工业大学学报（英文版）,2021,28(2):1-7,7.

基金项目

Sponsored by the National Science Fund for Distinguished Young Scholars(Grant No.51625201)and the National Natural Science Foundation of China(Grant No.51702066). （Grant No.51625201）

哈尔滨工业大学学报（英文版）

ISSN：1005-9113

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