半导体学报(英文版)2021,Vol.42Issue(5):37-48,12.DOI:10.1088/1674-4926/42/5/051801
Recent progress of physical failure analysis of GaN HEMTs
Recent progress of physical failure analysis of GaN HEMTs
摘要
关键词
GaN/high electron mobility transistors/physical analysis/failure mechanismKey words
GaN/high electron mobility transistors/physical analysis/failure mechanism引用本文复制引用
Xiaolong Cai,Chenglin Du,Zixuan Sun,Ran Ye,Haijun Liu,Yu Zhang,Xiangyang Duan,Hai Lu..Recent progress of physical failure analysis of GaN HEMTs[J].半导体学报(英文版),2021,42(5):37-48,12.基金项目
This work is supported by the National Key R&D Program of China (No.2017YFB0403000). (No.2017YFB0403000)